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SETFI: Manufacturing data: Semiconductor Tool Fault Isolation

Contact: Eugene Tuv - Submitted: 2008-11-24 23:46 - Views : 3013

During the semiconductor fabrication process each wafer goes through a product specific sequence of operations (hundreds) in batches - lots. Every lot goes through each operation in the sequence. At each operation a lot could go through only one of...  [more/question/discuss/rate/edit...]