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Abstract: A complex modern semi-conductor manufacturing process is normally under consistent surveillance via the monitoring of signals/variables collected from sensors and or process measurement points. However, not all of these signals are equally... [more/question/discuss/rate/edit...]
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During the semiconductor fabrication process each wafer goes through a product specific sequence of operations (hundreds) in batches - lots. Every lot goes through each operation in the sequence. At each operation a lot could go through only one of... [more/question/discuss/rate/edit...]
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