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SECOM: SEmi COnductor Manufacturing process control data

Contact: Michael McCann - Submitted: 2008-11-19 18:55 - Views : 3289

Abstract: A complex modern semi-conductor manufacturing process is normally under consistent surveillance via the monitoring of signals/variables collected from sensors and or process measurement points. However, not all of these signals are equally...  [more/question/discuss/rate/edit...]

SETFI: Manufacturing data: Semiconductor Tool Fault Isolation

Contact: Eugene Tuv - Submitted: 2008-11-24 23:46 - Views : 3269

During the semiconductor fabrication process each wafer goes through a product specific sequence of operations (hundreds) in batches - lots. Every lot goes through each operation in the sequence. At each operation a lot could go through only one of...  [more/question/discuss/rate/edit...]